The Micro and Nano Devices Research Laboratory

In collaboration with the Department of Electrical and Computer Engineering and the General Engineering Department, the Micro and Nano Devices Research Laboratory is a Class 100 (ISO Class 5) cleanroom for photolithography located at the UPRM Research and Development Center.  The facility houses a SUSS MicroTec Mask Aligner (MA-6) with backside alignment, a Reactive Ion Etcher with CF4 chemistry, a multiple target (AC/DC) Sputtering System (AJA Orion Thin Film Deposition System), a Stylus Profilometer (KLA Tencor P-6), a chemistry hood and photolithography peripherals.  An Electron Beam Lithography system (JEOL 6390 retrofitted with a JC Nabity Nano Pattern Generation System) is also available off-site.

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